Assignee

VEINGER DMITRY

IL·1 granted patent·1 citations·filing 2014–2014

Technology mixH01L1 H10F1

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0158US9231020B2Device and method of gettering on silicon on insulator (SOI) substrateVEINGER DMITRY·Filed 2014·Granted Jan 5, 2016·1 cites·14 claims

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