Assignee
VENUGOPAL VIJAYAKUMAR C
US·2 granted patents·51 citations·filing 2009–2010
Top patents by PatentIndex Score
2 records- 0195US8271121B2Methods and arrangements for in-situ process monitoring and control for plasma processing toolsVENUGOPAL VIJAYAKUMAR C·Filed 2010·Granted Sep 18, 2012·36 cites·20 claims
- 0286US8144328B2Methods and apparatus for normalizing optical emission spectraVENUGOPAL VIJAYAKUMAR C·Filed 2009·Granted Mar 27, 2012·15 cites·19 claims
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