Assignee
VERMEIRE BERT M
US·2 granted patents·6 citations·filing 2011–2011
Top patents by PatentIndex Score
2 records- 0183US8253422B2Method of manufacture of wafers using an electro-chemical residue sensor (ECRS)VERMEIRE BERT M·Filed 2011·Granted Aug 28, 2012·6 cites·8 claims
- 0249US8120368B2Method of monitoring the clean/rinse/dry processes of patterned wafers using an electro-chemical residue sensor (ECRS)VERMEIRE BERT M·Filed 2011·Granted Feb 21, 2012·0 cites·5 claims
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