Assignee
VERTEQ INC
US·24 granted patents·1,928 citations·filing 1987–2002
Top patents by PatentIndex Score
24 records- 0197US4998549AMegasonic cleaning apparatusVERTEQ INC·Filed 1988·Granted Mar 12, 1991·91 cites·20 claims
- 0297US4804007ACleaning apparatusVERTEQ INC·Filed 1987·Granted Feb 14, 1989·122 cites·12 claims
- 0396US6295999B1Wafer cleaning methodVERTEQ INC·Filed 2000·Granted Oct 2, 2001·63 cites·13 claims
- 0496US6039059AWafer cleaning systemVERTEQ INC·Filed 1996·Granted Mar 21, 2000·133 cites·28 claims
- 0596US5656097ASemiconductor wafer cleaning systemVERTEQ INC·Filed 1994·Granted Aug 12, 1997·263 cites·63 claims
- 0696US5037481AMegasonic cleaning methodVERTEQ INC·Filed 1990·Granted Aug 6, 1991·122 cites·6 claims
- 0794US6463938B2Wafer cleaning methodVERTEQ INC·Filed 2001·Granted Oct 15, 2002·45 cites·35 claims
- 0894US5090432ASingle wafer megasonic semiconductor wafer processing systemVERTEQ INC·Filed 1990·Granted Feb 25, 1992·169 cites·10 claims
- 0993US6378534B1Semiconductor wafer cleaning systemVERTEQ INC·Filed 2000·Granted Apr 30, 2002·60 cites·8 claims
- 1092US5908509ASemiconductor wafer cleaning systemVERTEQ INC·Filed 1997·Granted Jun 1, 1999·106 cites·29 claims
- 1192US5286657ASingle wafer megasonic semiconductor wafer processing systemVERTEQ INC·Filed 1991·Granted Feb 15, 1994·139 cites·3 claims
- 1291US6140744AWafer cleaning systemVERTEQ INC·Filed 1998·Granted Oct 31, 2000·67 cites·21 claims
- 1390US6684891B2Wafer cleaningVERTEQ INC·Filed 2002·Granted Feb 3, 2004·24 cites·7 claims
- 1490US6681782B2Wafer cleaningVERTEQ INC·Filed 2002·Granted Jan 27, 2004·26 cites·12 claims
- 1586US5365960AMegasonic transducer assemblyVERTEQ INC·Filed 1993·Granted Nov 22, 1994·96 cites·23 claims
- 1685US5556479AMethod and apparatus for drying semiconductor wafersVERTEQ INC·Filed 1994·Granted Sep 17, 1996·89 cites·6 claims
- 1783US5534076AMegasonic cleaning systemVERTEQ INC·Filed 1994·Granted Jul 9, 1996·77 cites·49 claims
- 1880US5996595ASemiconductor wafer cleaning systemVERTEQ INC·Filed 1997·Granted Dec 7, 1999·46 cites·14 claims
- 1980US5950645ASemiconductor wafer cleaning systemVERTEQ INC·Filed 1997·Granted Sep 14, 1999·48 cites·9 claims
- 2080US5539995AContinuous flow vapor dryer systemVERTEQ INC·Filed 1994·Granted Jul 30, 1996·29 cites·13 claims
- 2179US6679272B2Megasonic probe energy attenuatorVERTEQ INC·Filed 2001·Granted Jan 20, 2004·37 cites·14 claims
- 2278US6684890B2Megasonic cleaner probe system with gasified fluidVERTEQ INC·Filed 2001·Granted Feb 3, 2004·26 cites·16 claims
- 2365US6122837ACentrifugal wafer processor and methodVERTEQ INC·Filed 1998·Granted Sep 26, 2000·30 cites·12 claims
- 2445US6125551AGas seal and support for rotating semiconductor processorVERTEQ INC·Filed 1998·Granted Oct 3, 2000·20 cites·31 claims
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