Assignee
VERVOORDELDONK MICHAEL JOHANNES
NL·4 granted patents·18 citations·filing 2004–2011
Top patents by PatentIndex Score
4 records- 0182US8885147B2Lithographic apparatus and device manufacturing methodVERVOORDELDONK MICHAEL JOHANNES·Filed 2010·Granted Nov 11, 2014·5 cites·20 claims
- 0270US8279401B2Position control system, a lithographic apparatus and a method for controlling a position of a movable objectVERVOORDELDONK MICHAEL JOHANNES·Filed 2009·Granted Oct 2, 2012·4 cites·28 claims
- 0355US8091694B2Actuator arrangement for active vibration isolation comprising an inertial reference massVERVOORDELDONK MICHAEL JOHANNES·Filed 2004·Granted Jan 10, 2012·8 cites·6 claims
- 0442US8915340B2Actuator arrangement for active vibration isolation comprising an inertial reference massVERVOORDELDONK MICHAEL JOHANNES·Filed 2011·Granted Dec 23, 2014·1 cites·10 claims
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