Assignee
VUKOVIC MIRKO
US·2 granted patents·1 pending application·526 citations·filing 2004–2008
Top patents by PatentIndex Score
3 records- 0197US8252114B2Gas distribution system and method for distributing process gas in a processing systemVUKOVIC MIRKO·Filed 2008·Granted Aug 28, 2012·524 cites·17 claims
- 0254US8435351B2Method and system for measuring a flow rate in a solid precursor delivery systemVUKOVIC MIRKO·Filed 2004·Granted May 7, 2013·2 cites·22 claims
- 0344US2007074968A1ICP source for iPVD for uniform plasma in combination high pressure deposition and low pressure etch processVUKOVIC MIRKO·Filed 2005·Application pending·0 cites
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