Assignee
WACKER CHEMITRONIC
DE·115 granted patents·3,508 citations·filing 1975–1994
Top patents by PatentIndex Score
115 records- 0198US4179530AProcess for the deposition of pure semiconductor materialWACKER CHEMITRONIC·Filed 1979·Granted Dec 18, 1979·409 cites·4 claims
- 0295US4739589AProcess and apparatus for abrasive machining of a wafer-like workpieceWACKER CHEMITRONIC·Filed 1986·Granted Apr 26, 1988·107 cites·7 claims
- 0394US4330362ADevice and process for pulling high-purity semiconductor rods from a meltWACKER CHEMITRONIC·Filed 1981·Granted May 18, 1982·79 cites·12 claims
- 0493US4270316AProcess for evening out the amount of material removed from discs in polishingWACKER CHEMITRONIC·Filed 1979·Granted Jun 2, 1981·71 cites·4 claims
- 0592US4536642ADevice for treating gases at high temperaturesWACKER CHEMITRONIC·Filed 1983·Granted Aug 20, 1985·67 cites·3 claims
- 0692US4311545AMethod for the deposition of pure semiconductor materialWACKER CHEMITRONIC·Filed 1980·Granted Jan 19, 1982·57 cites·4 claims
- 0791US4173944ASilverplated vapor deposition chamberWACKER CHEMITRONIC·Filed 1978·Granted Nov 13, 1979·51 cites·2 claims
- 0891US4156619AProcess for cleaning semi-conductor discsWACKER CHEMITRONIC·Filed 1977·Granted May 29, 1979·65 cites·6 claims
- 0990US5242531AContinuous liquid silicon recharging process in czochralski crucible pullingWACKER CHEMITRONIC·Filed 1992·Granted Sep 7, 1993·110 cites·4 claims
- 1090US4131659AProcess for producing large-size, self-supporting plates of siliconWACKER CHEMITRONIC·Filed 1976·Granted Dec 26, 1978·46 cites·10 claims
- 1188US5487354AMethod for pulling a silicon single crystalWACKER CHEMITRONIC·Filed 1994·Granted Jan 30, 1996·84 cites·6 claims
- 1288US5324488AContinuous liquid silicon recharging process in czochralski crucible pullingWACKER CHEMITRONIC·Filed 1993·Granted Jun 28, 1994·74 cites·10 claims
- 1386US5181985AProcess for the wet-chemical surface treatment of semiconductor wafersWACKER CHEMITRONIC·Filed 1991·Granted Jan 26, 1993·156 cites·18 claims
- 1486US4175610AProcess and apparatus for the semicontinuous production of silicon moldingsWACKER CHEMITRONIC·Filed 1978·Granted Nov 27, 1979·43 cites·18 claims
- 1585US5051117AProcess for removing gaseous contaminating compounds from carrier gases containing halosilane compoundsWACKER CHEMITRONIC·Filed 1990·Granted Sep 24, 1991·60 cites·12 claims
- 1684US4539050AProcess for the manufacture of semiconductor wafers with a rear side having a gettering actionWACKER CHEMITRONIC·Filed 1983·Granted Sep 3, 1985·67 cites·12 claims
- 1783US5213451AApparatus and method of automatically separating stacked wafersWACKER CHEMITRONIC·Filed 1992·Granted May 25, 1993·114 cites·6 claims
- 1883US4454104AProcess for working up the residual gases obtained in the deposition of silicon and in the conversion of silicon tetrachlorideWACKER CHEMITRONIC·Filed 1982·Granted Jun 12, 1984·28 cites·10 claims
- 1983US4141764AProcess for the manufacture of silicon of large surface area bonded to a substrate and silicon-bonded substrates so madeWACKER CHEMITRONIC·Filed 1977·Granted Feb 27, 1979·33 cites·5 claims
- 2083US4112057AProcess for purifying halogenosilanesWACKER CHEMITRONIC·Filed 1976·Granted Sep 5, 1978·29 cites·4 claims
- 2182US4968381AMethod of haze-free polishing for semiconductor wafersWACKER CHEMITRONIC·Filed 1988·Granted Nov 6, 1990·65 cites·8 claims
- 2282US4844047AProcess for sawing crystal rods or blocks into thin wafersWACKER CHEMITRONIC·Filed 1987·Granted Jul 4, 1989·32 cites·12 claims
- 2382US4513544AMethod of sawing crystalline rods, and multiple-blade internal-hole saw for carrying out the methodWACKER CHEMITRONIC·Filed 1983·Granted Apr 30, 1985·31 cites·6 claims
- 2481US4522656AMethod of making reference surface markings on semiconductor wafers by laser beamWACKER CHEMITRONIC·Filed 1984·Granted Jun 11, 1985·57 cites·5 claims
- 2581US4194028AProcess for applying a protective layer to shaped carbon bodiesWACKER CHEMITRONIC·Filed 1978·Granted Mar 18, 1980·31 cites·15 claims
- 2681US4160504APackaging unit for semiconductor discsWACKER CHEMITRONIC·Filed 1978·Granted Jul 10, 1979·46 cites·12 claims
- 2778US4973563AProcess for preserving the surface of silicon wafersWACKER CHEMITRONIC·Filed 1989·Granted Nov 27, 1990·49 cites·8 claims
- 2878US4971654AProcess and apparatus for etching semiconductor surfacesWACKER CHEMITRONIC·Filed 1988·Granted Nov 20, 1990·61 cites·9 claims
- 2978US4118058ATool for the contact-free support of discsWACKER CHEMITRONIC·Filed 1977·Granted Oct 3, 1978·28 cites·5 claims
- 3077US4583997AProcess for reducing the hydroxyl content of optical waveguidesWACKER CHEMITRONIC·Filed 1984·Granted Apr 22, 1986·34 cites·8 claims
- 3177US4525336AProcess for removing impurities from silicon fragmentsWACKER CHEMITRONIC·Filed 1984·Granted Jun 25, 1985·24 cites·9 claims
- 3277US4283242AProcess for cementing semiconductor discs onto a carrier plateWACKER CHEMITRONIC·Filed 1979·Granted Aug 11, 1981·43 cites·3 claims
- 3377US4130632AProcess for the manufacture of trichlorosilane and silicon tetrachlorideWACKER CHEMITRONIC·Filed 1977·Granted Dec 19, 1978·26 cites·2 claims
- 3475US4330361AProcess for the manufacture of high-purity monocrystalsWACKER CHEMITRONIC·Filed 1981·Granted May 18, 1982·26 cites·3 claims
- 3571US5462011AMethod for pulling single crystalsWACKER CHEMITRONIC·Filed 1994·Granted Oct 31, 1995·22 cites·8 claims
- 3669US5464159AMethod for the contamination-free size reduction of semiconductor material, especially siliconWACKER CHEMITRONIC·Filed 1993·Granted Nov 7, 1995·26 cites·5 claims
- 3769US5400548AProcess for manufacturing semiconductor wafers having deformation ground in a defined wayWACKER CHEMITRONIC·Filed 1993·Granted Mar 28, 1995·51 cites·4 claims
- 3869US5351446AMethod and apparatus for the rotary sawing of brittle and hard materialsWACKER CHEMITRONIC·Filed 1992·Granted Oct 4, 1994·31 cites·7 claims
- 3969US5049200AProcess for the hydrophilizing and/or cement-residue-removing surface treatment of silicon wafersWACKER CHEMITRONIC·Filed 1988·Granted Sep 17, 1991·38 cites·9 claims
- 4068US5660335AMethod and device for the comminution of semiconductor materialWACKER CHEMITRONIC·Filed 1994·Granted Aug 26, 1997·22 cites·9 claims
- 4168US5089082AProcess and apparatus for producing silicon ingots having high oxygen content by crucible-free zone pulling, silicon ingots obtainable thereby and silicon wafers produced therefromWACKER CHEMITRONIC·Filed 1990·Granted Feb 18, 1992·26 cites·9 claims
- 4267US4062714AProcess for making hollow silicon bodies and bodies utilizing board-shaped members to form the basic geometric shape so madeWACKER CHEMITRONIC·Filed 1976·Granted Dec 13, 1977·20 cites·1 claims
- 4366US5108513ADevice for transporting and positioning semiconductor wafer-type workpiecesWACKER CHEMITRONIC·Filed 1990·Granted Apr 28, 1992·51 cites·2 claims
- 4466US5051134AProcess for the wet-chemical treatment of semiconductor surfacesWACKER CHEMITRONIC·Filed 1990·Granted Sep 24, 1991·56 cites·10 claims
- 4566US4515762AProcess for processing waste gases resulting during the production of siliconWACKER CHEMITRONIC·Filed 1982·Granted May 7, 1985·15 cites·4 claims
- 4666US4100014AEtching agent for III/V semiconductorsWACKER CHEMITRONIC·Filed 1977·Granted Jul 11, 1978·28 cites·14 claims
- 4764US5167667AProcess for treating polishing cloths used for semiconductor wafersWACKER CHEMITRONIC·Filed 1990·Granted Dec 1, 1992·22 cites·6 claims
- 4864US4448634AProcess for polishing III-V-semiconductor surfacesWACKER CHEMITRONIC·Filed 1983·Granted May 15, 1984·26 cites·6 claims
- 4964US4239585AProcess for the production of high purity silicon monocrystals having a low oxygen contentWACKER CHEMITRONIC·Filed 1978·Granted Dec 16, 1980·14 cites·3 claims
- 5063US4851628AMethod for the crucible-free floating zone pulling of semiconductor rods and an induction heating coil thereforWACKER CHEMITRONIC·Filed 1988·Granted Jul 25, 1989·20 cites·11 claims
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