Assignee

WACKER CHEMITRONIC GES F & E U

DE·1 granted patent·43 citations·filing 1994–1994

Technology mixB23Q1 B24B1 H10P1

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0165US5567199AWorkpiece holder for rotary grinding machines for grinding semiconductor wafers, and method of positioning the workpiece holderWACKER CHEMITRONIC GES F & E U·Filed 1994·Granted Oct 22, 1996·43 cites·9 claims

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