Assignee
WACKER SILTRONIC HALBLEITERMAT
DE·81 granted patents·13 pending applications·1,698 citations·filing 1995–2004
Top patents by PatentIndex Score
94 records- 0194US6295977B1Method and device for simultaneously cutting off a multiplicity of wafers from a workpieceWACKER SILTRONIC HALBLEITERMAT·Filed 1999·Granted Oct 2, 2001·186 cites·18 claims
- 0290US5935320AProcess for producing silicon semiconductor wafers with low defect densityWACKER SILTRONIC HALBLEITERMAT·Filed 1997·Granted Aug 10, 1999·148 cites·4 claims
- 0388US6228164B1Process for producing a single crystalWACKER SILTRONIC HALBLEITERMAT·Filed 1999·Granted May 8, 2001·67 cites·26 claims
- 0488US5771876AWire saw for and method of cutting off slices from a workpieceWACKER SILTRONIC HALBLEITERMAT·Filed 1996·Granted Jun 30, 1998·70 cites·20 claims
- 0588US5616065AWire saw and method for cutting wafers from a workpieceWACKER SILTRONIC HALBLEITERMAT·Filed 1996·Granted Apr 1, 1997·71 cites·24 claims
- 0686US6514424B2Process for the double-side polishing of semiconductor wafers and carrier for carrying out the processWACKER SILTRONIC HALBLEITERMAT·Filed 2001·Granted Feb 4, 2003·39 cites·14 claims
- 0785US6153008ADevice and method for pulling a single crystalWACKER SILTRONIC HALBLEITERMAT·Filed 1998·Granted Nov 28, 2000·61 cites·4 claims
- 0883US6530826B2Process for the surface polishing of silicon wafersWACKER SILTRONIC HALBLEITERMAT·Filed 2001·Granted Mar 11, 2003·35 cites·11 claims
- 0981US6458688B1Semiconductor wafer with improved flatness, and process for producing the semiconductor waferWACKER SILTRONIC HALBLEITERMAT·Filed 2000·Granted Oct 1, 2002·27 cites·15 claims
- 1081US5567399AApparatus for producing a single crystalWACKER SILTRONIC HALBLEITERMAT·Filed 1996·Granted Oct 22, 1996·56 cites·7 claims
- 1178US6630024B2Method for the production of an epitaxially grown semiconductor waferWACKER SILTRONIC HALBLEITERMAT·Filed 2001·Granted Oct 7, 2003·19 cites·25 claims
- 1278US6095898AProcess and device for polishing semiconductor wafersWACKER SILTRONIC HALBLEITERMAT·Filed 1998·Granted Aug 1, 2000·51 cites·10 claims
- 1378US5980361AMethod and device for polishing semiconductor wafersWACKER SILTRONIC HALBLEITERMAT·Filed 1997·Granted Nov 9, 1999·54 cites·12 claims
- 1477US6566267B1Inexpensive process for producing a multiplicity of semiconductor wafersWACKER SILTRONIC HALBLEITERMAT·Filed 2000·Granted May 20, 2003·21 cites·13 claims
- 1576US6390896B1Method and device for cutting a multiplicity of disks from a hard brittle workpieceWACKER SILTRONIC HALBLEITERMAT·Filed 1999·Granted May 21, 2002·57 cites·8 claims
- 1671US6645862B2Double-side polishing process with reduced scratch rate and device for carrying out the processWACKER SILTRONIC HALBLEITERMAT·Filed 2001·Granted Nov 11, 2003·16 cites·11 claims
- 1768US6316361B1CVD reactor and process for producing an epitally coated semiconductor waferWACKER SILTRONIC HALBLEITERMAT·Filed 1999·Granted Nov 13, 2001·26 cites·2 claims
- 1868US5911461ACarrier for a semiconductor wafer and use of the carrierWACKER SILTRONIC HALBLEITERMAT·Filed 1997·Granted Jun 15, 1999·42 cites·8 claims
- 1967US6234159B1Wire saw and process for cutting off shaped articlesWACKER SILTRONIC HALBLEITERMAT·Filed 1998·Granted May 22, 2001·27 cites·14 claims
- 2066US6217212B1Method and device for detecting an incorrect position of a semiconductor waferWACKER SILTRONIC HALBLEITERMAT·Filed 1998·Granted Apr 17, 2001·41 cites·5 claims
- 2164US6610213B1Process for the wet chemical treatment of a semiconductor waferWACKER SILTRONIC HALBLEITERMAT·Filed 2000·Granted Aug 26, 2003·11 cites·13 claims
- 2264US6283837B1Grinding machineWACKER SILTRONIC HALBLEITERMAT·Filed 1999·Granted Sep 4, 2001·27 cites·4 claims
- 2362US6412500B1Device and method for cleaning semiconductor wafersWACKER SILTRONIC HALBLEITERMAT·Filed 2000·Granted Jul 2, 2002·11 cites·7 claims
- 2462US5868831AProcess for controlling the growth of a crystalWACKER SILTRONIC HALBLEITERMAT·Filed 1997·Granted Feb 9, 1999·22 cites·4 claims
- 2561US6660082B2Method and apparatus for doping a melt with a dopantWACKER SILTRONIC HALBLEITERMAT·Filed 2001·Granted Dec 9, 2003·11 cites·5 claims
- 2661US6264843B1Process for reclaiming a suspensionWACKER SILTRONIC HALBLEITERMAT·Filed 2000·Granted Jul 24, 2001·8 cites·3 claims
- 2760US5951753AMethod and device for producing monocrystalsWACKER SILTRONIC HALBLEITERMAT·Filed 1997·Granted Sep 14, 1999·15 cites·3 claims
- 2857US6530381B1Process for the wet-chemical surface treatment of a semiconductor waferWACKER SILTRONIC HALBLEITERMAT·Filed 2000·Granted Mar 11, 2003·9 cites·3 claims
- 2956US6461582B2Single-crystal rod and process for its productionWACKER SILTRONIC HALBLEITERMAT·Filed 2001·Granted Oct 8, 2002·3 cites·5 claims
- 3056US6451124B1Process for the chemical treatment of semiconductor wafersWACKER SILTRONIC HALBLEITERMAT·Filed 2001·Granted Sep 17, 2002·6 cites·6 claims
- 3156US6306735B1Method for producing a semiconductor waferWACKER SILTRONIC HALBLEITERMAT·Filed 2000·Granted Oct 23, 2001·5 cites·18 claims
- 3255US6554686B1Sawing wire and method for the cutting and lapping of hard brittle workpiecesWACKER SILTRONIC HALBLEITERMAT·Filed 2000·Granted Apr 29, 2003·8 cites·6 claims
- 3355US6503335B2Centrifuge and method for centrifuging a semiconductor waferWACKER SILTRONIC HALBLEITERMAT·Filed 1999·Granted Jan 7, 2003·25 cites·9 claims
- 3454US6416393B2Process for producing a semiconductor waferWACKER SILTRONIC HALBLEITERMAT·Filed 2001·Granted Jul 9, 2002·7 cites·9 claims
- 3554US5695572ACleaning agent and method for cleaning semiconductor wafersWACKER SILTRONIC HALBLEITERMAT·Filed 1995·Granted Dec 9, 1997·24 cites·14 claims
- 3653US6117776AWafer holder and method of producing a semiconductor waferWACKER SILTRONIC HALBLEITERMAT·Filed 1998·Granted Sep 12, 2000·17 cites·7 claims
- 3752US6640796B2Method for separating slices from a hard brittle workpiece, and wire saw for carrying out the methodWACKER SILTRONIC HALBLEITERMAT·Filed 2002·Granted Nov 4, 2003·1 cites·19 claims
- 3852US6051498AMethod for manufacturing a semiconductor wafer which is coated on one side and provided with a finishWACKER SILTRONIC HALBLEITERMAT·Filed 1998·Granted Apr 18, 2000·20 cites·8 claims
- 3951US6350314B1Process for producing nitrogen-doped semiconductor wafersWACKER SILTRONIC HALBLEITERMAT·Filed 2000·Granted Feb 26, 2002·2 cites·12 claims
- 4051US6159284AProcess and device for producing a cylindrical single crystal and process for cutting semiconductor wafersWACKER SILTRONIC HALBLEITERMAT·Filed 1999·Granted Dec 12, 2000·21 cites·10 claims
- 4150US6073878AMethod and device for unwinding or winding up a sawing wireWACKER SILTRONIC HALBLEITERMAT·Filed 1998·Granted Jun 13, 2000·9 cites·7 claims
- 4249US6117230AProcess for producing a silicon single crystal, and heater for carrying out the processWACKER SILTRONIC HALBLEITERMAT·Filed 1997·Granted Sep 12, 2000·14 cites·6 claims
- 4349US6046117AProcess for etching semiconductor wafersWACKER SILTRONIC HALBLEITERMAT·Filed 1998·Granted Apr 4, 2000·19 cites·5 claims
- 4448US6767848B2Silicon semiconductor substrate and method for production thereofWACKER SILTRONIC HALBLEITERMAT·Filed 2002·Granted Jul 27, 2004·4 cites·10 claims
- 4548US6395653B1Semiconductor wafer with crystal lattice defects, and process for producing this waferWACKER SILTRONIC HALBLEITERMAT·Filed 2000·Granted May 28, 2002·5 cites·8 claims
- 4648US6050254AWire saw, repair station, maintenance and testing station for a wire-guiding-roller unit of the wire saw, and method of exchanging the wire-guiding-roller unitWACKER SILTRONIC HALBLEITERMAT·Filed 1998·Granted Apr 18, 2000·12 cites·7 claims
- 4747US6129609AMethod for achieving a wear performance which is as linear as possible and tool having a wear performance which is as linear as possibleWACKER SILTRONIC HALBLEITERMAT·Filed 1998·Granted Oct 10, 2000·16 cites·5 claims
- 4847US6098610AWire saw and method of using itWACKER SILTRONIC HALBLEITERMAT·Filed 1998·Granted Aug 8, 2000·12 cites·10 claims
- 4946US6435797B1Method and device for loading a susceptorWACKER SILTRONIC HALBLEITERMAT·Filed 2000·Granted Aug 20, 2002·4 cites·14 claims
- 5045US6287528B1Method for removing dustWACKER SILTRONIC HALBLEITERMAT·Filed 1999·Granted Sep 11, 2001·11 cites·7 claims
Showing the top 50 of 94 patent records by PatentIndex Score.
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