Assignee

WAFERMASTER INC

US·2 granted patents·28 citations·filing 2001–2007

Technology mixB01D1 C23C1 C30B1 G01N1 G01R1 H10P1

Top patents by PatentIndex Score

2 records

0178US7816152B2In situ, ex situ and inline process monitoring, optimization and fabricationWAFERMASTER INC·Filed 2007·Granted Oct 19, 2010·7 cites·12 claims
0273US6737361B2Method for H2 Recycling in semiconductor processing systemWAFERMASTER INC·Filed 2001·Granted May 18, 2004·21 cites·14 claims

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