Assignee
WAGNER MARK I
US·2 granted patents·2 citations·filing 2009–2009
Top patents by PatentIndex Score
2 records- 0158US9620410B1Methods for preventing precipitation of etch byproducts during an etch process and/or subsequent rinse processWAGNER MARK I·Filed 2009·Granted Apr 11, 2017·1 cites·20 claims
- 0258US8961701B2Method and system of drying a microelectronic topographyWAGNER MARK I·Filed 2009·Granted Feb 24, 2015·1 cites·28 claims
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