Assignee
WANG HSIEN-CHENG
TW·4 granted patents·37 citations·filing 2009–2011
Top patents by PatentIndex Score
4 records- 0197US8507177B2Photoresist materials and photolithography processesWANG HSIEN-CHENG·Filed 2011·Granted Aug 13, 2013·34 cites·19 claims
- 0267US8416393B2Cross quadrupole double lithography method and apparatus for semiconductor device fabrication using two aperturesWANG HSIEN-CHENG·Filed 2009·Granted Apr 9, 2013·2 cites·19 claims
- 0365US9543406B2Structure and method for overlay marksWANG HSIEN-CHENG·Filed 2011·Granted Jan 10, 2017·1 cites·20 claims
- 0456US8848163B2Photoresist materials and photolithography processesWANG HSIEN-CHENG·Filed 2011·Granted Sep 30, 2014·0 cites·16 claims
Counts cover granted patents and pending applications in the PatentIndex corpus. How scoring works →