Assignee
WANG JUDY
US·1 granted patent·2 pending applications·16 citations·filing 2007–2008
Top patents by PatentIndex Score
3 records- 0185US8133819B2Plasma etching carbonaceous layers with sulfur-based etchantsWANG JUDY·Filed 2008·Granted Mar 13, 2012·16 cites·18 claims
- 0248US2008286977A1Process to open carbon based hardmask overlying a dielectric layerWANG JUDY·Filed 2008·Application pending·0 cites
- 0340US2008203056A1Methods for etching high aspect ratio featuresWANG JUDY·Filed 2007·Application pending·0 cites
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