Assignee
WATANABE YUKIO
JP·4 granted patents·3 pending applications·11 citations·filing 2005–2012
Top patents by PatentIndex Score
7 records- 0181US8669542B2Extreme ultraviolet light source apparatusWATANABE YUKIO·Filed 2010·Granted Mar 11, 2014·5 cites·7 claims
- 0279US8238392B2Temperature controller for gas laserWATANABE YUKIO·Filed 2010·Granted Aug 7, 2012·3 cites·7 claims
- 0371US9301379B2Extreme ultraviolet light generation apparatusWATANABE YUKIO·Filed 2012·Granted Mar 29, 2016·3 cites·23 claims
- 0454US8498317B2Temperature controller for gas laserWATANABE YUKIO·Filed 2012·Granted Jul 30, 2013·0 cites·4 claims
- 0551US2012119118A1Extreme ultraviolet light source systemWATANABE YUKIO·Filed 2012·Application pending·0 cites
- 0647US2010193711A1Extreme ultraviolet light source systemWATANABE YUKIO·Filed 2010·Application pending·0 cites
- 0734US2008008640A1Cluster-Free Amorphous Silicon Film, and Method and Apparatus for Producing the SameWATANABE YUKIO·Filed 2005·Application pending·0 cites
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