Assignee
WEDOWSKI MARCO
DE·2 granted patents·1 pending application·3 citations·filing 2005–2011
Top patents by PatentIndex Score
3 records- 0170US8164077B2Optical element for radiation in the EUV and/or soft X-ray region and an optical system with at least one optical elementWEDOWSKI MARCO·Filed 2009·Granted Apr 24, 2012·3 cites·33 claims
- 0247US8633460B2Reflective optical element, optical system EUV and lithography deviceWEDOWSKI MARCO·Filed 2011·Granted Jan 21, 2014·0 cites·17 claims
- 0341US2006076516A1Reflective optical element, optical system and EUV lithography deviceWEDOWSKI MARCO·Filed 2005·Application pending·0 cites
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