Assignee
WERBER ARMIN
DE·2 granted patents·2 citations·filing 2011–2011
Top patents by PatentIndex Score
2 records- 0162US9013676B2Individual mirror for constructing a faceted mirror, in particular for use in a projection exposure system for microlithographyWERBER ARMIN·Filed 2011·Granted Apr 21, 2015·2 cites·24 claims
- 0242US9025128B2Actuator including magnet for a projection exposure system and projection exposure system including a magnetWERBER ARMIN·Filed 2011·Granted May 5, 2015·0 cites·33 claims
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