Assignee
WESTECH SYSTEMS INC
US·4 granted patents·431 citations·filing 1988–1993
Top patents by PatentIndex Score
4 records- 0192US4944119AApparatus for transporting wafer to and from polishing headWESTECH SYSTEMS INC·Filed 1988·Granted Jul 31, 1990·67 cites·8 claims
- 0291US5456627AConditioner for a polishing pad and method thereforWESTECH SYSTEMS INC·Filed 1993·Granted Oct 10, 1995·226 cites·16 claims
- 0391US5095661AApparatus for transporting wafer to and from polishing headWESTECH SYSTEMS INC·Filed 1989·Granted Mar 17, 1992·61 cites·3 claims
- 0479US5144711ACleaning brush for semiconductor waferWESTECH SYSTEMS INC·Filed 1991·Granted Sep 8, 1992·77 cites·9 claims
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