Assignee
WILSON AARON R
US·4 granted patents·2 pending applications·34 citations·filing 2003–2012
Top patents by PatentIndex Score
6 records- 0194US8093725B2High aspect ratio contactsWILSON AARON R·Filed 2009·Granted Jan 10, 2012·22 cites·19 claims
- 0286US8419958B2Using positive DC offset of bias RF to neutralize charge build-up of etch featuresWILSON AARON R·Filed 2010·Granted Apr 16, 2013·6 cites·19 claims
- 0383US8138526B2Semiconductor structures including dual finsWILSON AARON R·Filed 2010·Granted Mar 20, 2012·5 cites·17 claims
- 0465US8497530B2Semiconductor structures including dual finsWILSON AARON R·Filed 2012·Granted Jul 30, 2013·1 cites·13 claims
- 0551US2012104550A1High aspect ratio contactsWILSON AARON R·Filed 2012·Application pending·0 cites
- 0639US2004219790A1Etching methods, RIE methods, and methods of increasing the stability of photoresist during RIEWILSON AARON R·Filed 2003·Application pending·0 cites
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