Assignee
WJ SEMICONDUCTOR EQUIPMENT GRO
US·7 granted patents·302 citations·filing 1996–1997
Top patents by PatentIndex Score
7 records- 0187US5903106APlasma generating apparatus having an electrostatic shieldWJ SEMICONDUCTOR EQUIPMENT GRO·Filed 1997·Granted May 11, 1999·82 cites·49 claims
- 0281US5894400AMethod and apparatus for clamping a substrateWJ SEMICONDUCTOR EQUIPMENT GRO·Filed 1997·Granted Apr 13, 1999·84 cites·11 claims
- 0380US5916378AMethod of reducing metal contamination during semiconductor processing in a reactor having metal componentsWJ SEMICONDUCTOR EQUIPMENT GRO·Filed 1997·Granted Jun 29, 1999·58 cites·34 claims
- 0469US5925420AMethod for preparing crosslinked aromatic polymers as low κ dielectricsWJ SEMICONDUCTOR EQUIPMENT GRO·Filed 1996·Granted Jul 20, 1999·24 cites·32 claims
- 0561US5935647AMethod of manufacturing an injector for chemical vapor deposition processingWJ SEMICONDUCTOR EQUIPMENT GRO·Filed 1997·Granted Aug 10, 1999·20 cites·2 claims
- 0648US5938851AExhaust vent assembly for chemical vapor deposition systemsWJ SEMICONDUCTOR EQUIPMENT GRO·Filed 1997·Granted Aug 17, 1999·22 cites·16 claims
- 0744US5921560ADirect drive rotational motor with axial vacuumWJ SEMICONDUCTOR EQUIPMENT GRO·Filed 1997·Granted Jul 13, 1999·12 cites·4 claims
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