Assignee

WORLDBEAM SOLUTION CO LTD

KR·1 granted patent·0 citations·filing 2021–2021

Technology mixH01J1 H05G1

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0148US12451316B2Extreme-ultraviolet light source device using electron beamsWORLDBEAM SOLUTION CO LTD·Filed 2021·Granted Oct 21, 2025·0 cites·10 claims

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