Assignee
WU BANQIU
US·8 granted patents·8 pending applications·29 citations·filing 2008–2025
Top patents by PatentIndex Score
16 records- 0194US8962224B2Methods for controlling defects for extreme ultraviolet lithography (EUVL) photomask substrateWU BANQIU·Filed 2013·Granted Feb 24, 2015·10 cites·20 claims
- 0285US8709706B2Methods and apparatus for performing multiple photoresist layer development and etching processesWU BANQIU·Filed 2012·Granted Apr 29, 2014·4 cites·19 claims
- 0383US9439330B13D IC computer systemWU BANQIU·Filed 2015·Granted Sep 6, 2016·4 cites·14 claims
- 0478US9439331B1Cost-effective cooling method for computer systemWU BANQIU·Filed 2015·Granted Sep 6, 2016·3 cites·15 claims
- 0576US9748125B2Continuous substrate processing systemWU BANQIU·Filed 2013·Granted Aug 29, 2017·3 cites·6 claims
- 0676US8084757B2Contamination prevention in extreme ultraviolet lithographyWU BANQIU·Filed 2008·Granted Dec 27, 2011·4 cites·17 claims
- 0767US2026023365A1Monolithic 3D AI computer systemWU BANQIU·Filed 2024·Application pending·0 cites
- 0863US2024422941A1Novel 3D Artificial Intelligence Computer SystemWU BANQIU·Filed 2024·Application pending·0 cites
- 0961US9480187B2Cooling method for a 3D IC computer systemWU BANQIU·Filed 2015·Granted Oct 25, 2016·1 cites·12 claims
- 1057US2025279334A1Novel 3D IC heat dissipation apparatus and methodWU BANQIU·Filed 2025·Application pending·0 cites
- 1149US2012318773A1Methods and apparatus for controlling photoresist line width roughness with enhanced electron spin controlWU BANQIU·Filed 2012·Application pending·0 cites
- 1246US2009183322A1Electrostatic surface cleaningWU BANQIU·Filed 2008·Application pending·0 cites
- 1346US2010028813A1Backside cleaning of substrateWU BANQIU·Filed 2008·Application pending·0 cites
- 1443US2014356768A1Charged beam plasma apparatus for photomask manufacture applicationsWU BANQIU·Filed 2013·Application pending·0 cites
- 1542US9039910B2Methods and apparatus for controlling photoresist line width roughnessWU BANQIU·Filed 2011·Granted May 26, 2015·0 cites·13 claims
- 1635US2016286688A1Cooling Method for Computer SystemWU BANQIU·Filed 2015·Application pending·0 cites
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