Assignee

WUXI WIO TECH CO LTD

CN·1 granted patent·0 citations·filing 2015–2015

Technology mixB81B1 B81C1 G01P1 G02B1 H01G1 H02N1

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1 record

0132US10077184B2MEMS automatic alignment high-and-low comb tooth and manufacturing method thereofWUXI WIO TECH CO LTD·Filed 2015·Granted Sep 18, 2018·0 cites·9 claims

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