Assignee
XACTIX INC
US·5 granted patents·65 citations·filing 2000–2009
Top patents by PatentIndex Score
5 records- 0190US6887337B2Apparatus for etching semiconductor samples and a source for providing a gas by sublimation theretoXACTIX INC·Filed 2001·Granted May 3, 2005·49 cites·35 claims
- 0277US7638435B2Pulsed etching coolingXACTIX INC·Filed 2006·Granted Dec 29, 2009·6 cites·6 claims
- 0365US8377253B2Pulsed etching coolingXACTIX INC·Filed 2009·Granted Feb 19, 2013·2 cites·12 claims
- 0457US6566725B1Thermal isolation using vertical structuresXACTIX INC·Filed 2000·Granted May 20, 2003·5 cites·33 claims
- 0548US6653239B2Thermal isolation using vertical structuresXACTIX INC·Filed 2001·Granted Nov 25, 2003·3 cites·20 claims
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