Assignee
XINIX INC
US·8 granted patents·252 citations·filing 1989–1993
Top patents by PatentIndex Score
8 records- 0189US5292605AMethod for control of photoresist develop processesXINIX INC·Filed 1992·Granted Mar 8, 1994·84 cites·14 claims
- 0286US5196285AMethod for control of photoresist develop processesXINIX INC·Filed 1990·Granted Mar 23, 1993·62 cites·13 claims
- 0363US5414504AInterference removalXINIX INC·Filed 1993·Granted May 9, 1995·12 cites·28 claims
- 0463US5012119AMethod and apparatus for monitoring particles using back-scattered light without interference by bubblesXINIX INC·Filed 1989·Granted Apr 30, 1991·34 cites·8 claims
- 0562US5138149AApparatus and method for monitoring radiant energy signals with variable signal gain and resolution enhancementXINIX INC·Filed 1990·Granted Aug 11, 1992·33 cites·27 claims
- 0660US5208644AInterference removalXINIX INC·Filed 1990·Granted May 4, 1993·12 cites·6 claims
- 0732US5166525AThrough the wafer optical transmission sensorXINIX INC·Filed 1991·Granted Nov 24, 1992·10 cites·7 claims
- 0828US5064269ALight collection method and apparatusXINIX INC·Filed 1990·Granted Nov 12, 1991·5 cites·5 claims
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