Assignee
XIONG YALIN
US·2 granted patents·44 citations·filing 2009–2012
Top patents by PatentIndex Score
2 records- 0194US8785082B2Method and apparatus for inspecting a reflective lithographic mask blank and improving mask qualityXIONG YALIN·Filed 2012·Granted Jul 22, 2014·16 cites·24 claims
- 0293US8204297B1Methods and systems for classifying defects detected on a reticleXIONG YALIN·Filed 2009·Granted Jun 19, 2012·28 cites·19 claims
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