Assignee
YAKSHIN ANDREY E
NL·2 granted patents·1 pending application·10 citations·filing 2001–2011
Top patents by PatentIndex Score
3 records- 0175US8144830B2Reflective optical element for EUV lithography deviceYAKSHIN ANDREY E·Filed 2009·Granted Mar 27, 2012·10 cites·21 claims
- 0257US8475635B2Processes and device for the deposition of films on substratesYAKSHIN ANDREY E·Filed 2011·Granted Jul 2, 2013·0 cites·8 claims
- 0334US2004245090A1Process for manufacturing multilayer systemsYAKSHIN ANDREY E·Filed 2001·Application pending·0 cites
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