Assignee
YAKUNIN ANDREI MIKHAILOVICH
NL·8 granted patents·2 pending applications·19 citations·filing 2009–2012
Top patents by PatentIndex Score
10 records- 0192US9395630B2Lithographic apparatus and methodYAKUNIN ANDREI MIKHAILOVICH·Filed 2011·Granted Jul 19, 2016·13 cites·16 claims
- 0269US8755032B2Radiation source and lithographic apparatusYAKUNIN ANDREI MIKHAILOVICH·Filed 2009·Granted Jun 17, 2014·2 cites·25 claims
- 0363US9448492B2Multilayer mirror, method of producing a multilayer mirror and lithographic apparatusYAKUNIN ANDREI MIKHAILOVICH·Filed 2012·Granted Sep 20, 2016·2 cites·12 claims
- 0459US9529283B2Radiation source, lithographic apparatus, and device manufacturing methodYAKUNIN ANDREI MIKHAILOVICH·Filed 2009·Granted Dec 27, 2016·2 cites·19 claims
- 0548US9377695B2Grazing incidence reflectors, lithographic apparatus, methods for manufacturing a grazing incidence reflector and methods for manufacturing a deviceYAKUNIN ANDREI MIKHAILOVICH·Filed 2012·Granted Jun 28, 2016·0 cites·17 claims
- 0646US9046780B2Multilayer mirror and lithographic apparatusYAKUNIN ANDREI MIKHAILOVICH·Filed 2012·Granted Jun 2, 2015·0 cites·14 claims
- 0739US9007565B2Spectral purity filterYAKUNIN ANDREI MIKHAILOVICH·Filed 2010·Granted Apr 14, 2015·0 cites·17 claims
- 0839US2012182537A1Spectral purity filter, lithographic apparatus, and device manufacturing methodYAKUNIN ANDREI MIKHAILOVICH·Filed 2010·Application pending·0 cites
- 0938US9366967B2Radiation sourceYAKUNIN ANDREI MIKHAILOVICH·Filed 2012·Granted Jun 14, 2016·0 cites·13 claims
- 1029US2012170015A1Spectral purity filter, lithographic apparatus, method for manufacturing a spectral purity filter and method of manufacturing a device using lithographic apparatusYAKUNIN ANDREI MIKHAILOVICH·Filed 2010·Application pending·0 cites
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