Assignee
YAMAZAWA YOHEI
JP·17 granted patents·1 pending application·192 citations·filing 2007–2012
Top patents by PatentIndex Score
18 records- 0198US9313872B2Plasma processing apparatus and plasma processing methodYAMAZAWA YOHEI·Filed 2010·Granted Apr 12, 2016·52 cites·27 claims
- 0295US8415885B2Plasma processing apparatus and plasma processing methodYAMAZAWA YOHEI·Filed 2011·Granted Apr 9, 2013·25 cites·26 claims
- 0394US9293299B2Plasma processing apparatusYAMAZAWA YOHEI·Filed 2012·Granted Mar 22, 2016·16 cites·27 claims
- 0493US9627181B2Plasma processing apparatusYAMAZAWA YOHEI·Filed 2011·Granted Apr 18, 2017·17 cites·24 claims
- 0593US9253867B2Plasma processing apparatus and plasma processing methodYAMAZAWA YOHEI·Filed 2010·Granted Feb 2, 2016·11 cites·10 claims
- 0689US8398815B2Plasma processing apparatusYAMAZAWA YOHEI·Filed 2008·Granted Mar 19, 2013·12 cites·32 claims
- 0789US8251011B2Plasma processing apparatusYAMAZAWA YOHEI·Filed 2007·Granted Aug 28, 2012·13 cites·19 claims
- 0888US8741097B2Plasma processing apparatus and plasma processing methodYAMAZAWA YOHEI·Filed 2010·Granted Jun 3, 2014·7 cites·11 claims
- 0988US8608903B2Plasma processing apparatus and plasma processing methodYAMAZAWA YOHEI·Filed 2010·Granted Dec 17, 2013·9 cites·13 claims
- 1086US9218943B2Plasma processing apparatus and plasma processing methodYAMAZAWA YOHEI·Filed 2011·Granted Dec 22, 2015·8 cites·15 claims
- 1185US9275837B2Plasma processing apparatusYAMAZAWA YOHEI·Filed 2010·Granted Mar 1, 2016·7 cites·8 claims
- 1283US8261691B2Plasma processing apparatusYAMAZAWA YOHEI·Filed 2008·Granted Sep 11, 2012·7 cites·19 claims
- 1379US8647442B2Cleaning substrate and cleaning methodYAMAZAWA YOHEI·Filed 2012·Granted Feb 11, 2014·2 cites·4 claims
- 1473US8529730B2Plasma processing apparatusYAMAZAWA YOHEI·Filed 2012·Granted Sep 10, 2013·2 cites·13 claims
- 1567US8157953B2Plasma processing apparatusYAMAZAWA YOHEI·Filed 2007·Granted Apr 17, 2012·1 cites·18 claims
- 1662US9119282B2Plasma processing apparatus and plasma processing methodYAMAZAWA YOHEI·Filed 2012·Granted Aug 25, 2015·2 cites·23 claims
- 1756US9351389B2Plasma processing apparatusYAMAZAWA YOHEI·Filed 2011·Granted May 24, 2016·1 cites·41 claims
- 1855US2012248066A1Plasma processing apparatus and plasma processing methodYAMAZAWA YOHEI·Filed 2012·Application pending·0 cites
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