Assignee
YANAGISAWA YOSHIHIKO
JP·2 granted patents·6 citations·filing 2006–2011
Top patents by PatentIndex Score
2 records- 0173US8172950B2Substrate processing apparatus and semiconductor device producing methodYANAGISAWA YOSHIHIKO·Filed 2006·Granted May 8, 2012·6 cites·8 claims
- 0257US8222161B2Substrate processing apparatus and semiconductor devices manufacturing methodYANAGISAWA YOSHIHIKO·Filed 2011·Granted Jul 17, 2012·0 cites·12 claims
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