Assignee
Yang hong sheng
US·3 granted patents·5 pending applications·2 citations·filing 2011–2012
Top patents by PatentIndex Score
8 records- 0178US8906207B2Control of film composition in co-sputter deposition by using collimatorsYang hong sheng·Filed 2011·Granted Dec 9, 2014·2 cites·18 claims
- 0248US8920618B2Combinatorial processing using high deposition rate sputteringYang hong sheng·Filed 2011·Granted Dec 30, 2014·0 cites·15 claims
- 0346US2013270104A1Combinatorial processing using mosaic sputtering targetsYang hong sheng·Filed 2012·Application pending·0 cites
- 0446US2013168231A1Method For Sputter Deposition And RF Plasma Sputter Etch Combinatorial ProcessingYang hong sheng·Filed 2011·Application pending·0 cites
- 0541US9175382B2High metal ionization sputter gunYang hong sheng·Filed 2011·Granted Nov 3, 2015·0 cites·12 claims
- 0639US2013146442A1Profiled sputter targetYang hong sheng·Filed 2011·Application pending·0 cites
- 0738US2013101749A1Method and Apparatus for Enhanced Film UniformityYang hong sheng·Filed 2011·Application pending·0 cites
- 0837US2013153413A1Sputter gun shutterYang hong sheng·Filed 2011·Application pending·0 cites
Join the waitlist — get patent alerts
Get an alert when Yang hong sheng files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Counts cover granted patents and pending applications in the PatentIndex corpus. How scoring works →