Assignee
YANG JANG-GYOO
US·1 granted patent·1 pending application·39 citations·filing 2011–2011
Top patents by PatentIndex Score
2 records- 0194US10283321B2Semiconductor processing system and methods using capacitively coupled plasmaYANG JANG GYOO·Filed 2011·Granted May 7, 2019·39 cites·15 claims
- 0246US2012180954A1Semiconductor processing system and methods using capacitively coupled plasmaYANG JANG-GYOO·Filed 2011·Application pending·0 cites
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