Assignee
YANG MING-CHUAN
US·4 granted patents·6 citations·filing 2010–2012
Top patents by PatentIndex Score
4 records- 0182US8715893B2Masks for use in lithography including image reversal assist features, lithography systems including such masks, and methods of forming such masksYANG MING-CHUAN·Filed 2012·Granted May 6, 2014·3 cites·20 claims
- 0267US8647977B2Methods of forming interconnectsYANG MING-CHUAN·Filed 2011·Granted Feb 11, 2014·2 cites·22 claims
- 0364US8555210B2Systems and methods for stochastic models of mask process variabilityYANG MING-CHUAN·Filed 2011·Granted Oct 8, 2013·1 cites·13 claims
- 0449US8298729B2Microlithography masks including image reversal assist features, microlithography systems including such masks, and methods of forming such masksYANG MING-CHUAN·Filed 2010·Granted Oct 30, 2012·0 cites·27 claims
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