Assignee
YANG PAI-HSUEH
US·6 granted patents·2 pending applications·10 citations·filing 2007–2012
Top patents by PatentIndex Score
8 records- 0180US8140288B2On-machine methods for identifying and compensating force-ripple and side-forces produced by actuators on a multiple-axis stageYANG PAI-HSUEH·Filed 2007·Granted Mar 20, 2012·6 cites·41 claims
- 0279US9465305B2Method for determining a commutation offset and for determining a compensation map for a stageYANG PAI-HSUEH·Filed 2011·Granted Oct 11, 2016·3 cites·41 claims
- 0366US9013134B2Method for determing a commutation offset and for determining a compensation map for a stageYANG PAI-HSUEH·Filed 2011·Granted Apr 21, 2015·1 cites·20 claims
- 0444US8451431B2Control systems and methods applying iterative feedback tuning for feed-forward and synchronization control of microlithography stages and the likeYANG PAI-HSUEH·Filed 2010·Granted May 28, 2013·0 cites·21 claims
- 0541US9529353B2Methods for limiting counter-mass trim-motor force and stage assemblies incorporating sameYANG PAI-HSUEH·Filed 2011·Granted Dec 27, 2016·0 cites·24 claims
- 0641US9243969B2Method for calibrating a force constant of a motorized stage used for supporting and moving a workpieceYANG PAI-HSUEH·Filed 2011·Granted Jan 26, 2016·0 cites·15 claims
- 0740US2012319637A1Synchronization control devices and methodsYANG PAI-HSUEH·Filed 2011·Application pending·0 cites
- 0840US2013049647A1Force Distribution Method for Stage Systems Utilizing Dual ActuatorsYANG PAI-HSUEH·Filed 2012·Application pending·0 cites
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