Assignee
YANG YAO-HUNG
US·3 granted patents·2 pending applications·423 citations·filing 2011–2013
Top patents by PatentIndex Score
5 records- 0197US8338809B2Ultraviolet reflector with coolant gas holes and methodYANG YAO-HUNG·Filed 2011·Granted Dec 25, 2012·408 cites·23 claims
- 0288US9089007B2Method and apparatus for substrate support with multi-zone heatingYANG YAO-HUNG·Filed 2013·Granted Jul 21, 2015·10 cites·20 claims
- 0382US8309421B2Dual-bulb lamphead control methodologyYANG YAO-HUNG·Filed 2011·Granted Nov 13, 2012·5 cites·17 claims
- 0448US2013122611A1Dual-bulb lamphead control methodologyYANG YAO-HUNG·Filed 2012·Application pending·0 cites
- 0539US2013287529A1Method and apparatus for independent wafer handlingYANG YAO-HUNG·Filed 2013·Application pending·0 cites
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