Assignee
YANG YU-SIN
KR·2 granted patents·12 citations·filing 2007–2009
Top patents by PatentIndex Score
2 records- 0182US8126258B2Method of detecting defects in patterns on semiconductor substrate by comparing second image with reference image after acquiring second image from first image and apparatus for performing the sameYANG YU-SIN·Filed 2007·Granted Feb 28, 2012·9 cites·12 claims
- 0263US8184899B2Method of detecting a defect on an objectYANG YU-SIN·Filed 2009·Granted May 22, 2012·3 cites·15 claims
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