Assignee
YASHIMA JUN
JP·12 granted patents·42 citations·filing 2007–2012
Top patents by PatentIndex Score
12 records- 0190US8065635B2Method for resizing pattern to be written by lithography technique, and charged particle beam writing methodYASHIMA JUN·Filed 2007·Granted Nov 22, 2011·10 cites·4 claims
- 0288US8122390B2Charged particle beam writing apparatus, and apparatus and method for correcting dimension error of patternYASHIMA JUN·Filed 2009·Granted Feb 21, 2012·10 cites·10 claims
- 0383US8183545B2Charged particle beam writing apparatus, charged particle beam writing method and apparatus of processing data for charged particle beam writingYASHIMA JUN·Filed 2010·Granted May 22, 2012·5 cites·12 claims
- 0481US8563952B2Charged particle beam writing apparatusYASHIMA JUN·Filed 2012·Granted Oct 22, 2013·5 cites·18 claims
- 0579US8429575B2Method for resizing pattern to be written by lithography technique, and charged particle beam writing methodYASHIMA JUN·Filed 2011·Granted Apr 23, 2013·3 cites·2 claims
- 0676US8669537B2Charged particle beam writing apparatus and methodYASHIMA JUN·Filed 2009·Granted Mar 11, 2014·4 cites·6 claims
- 0772US8466440B2Charged particle beam drawing apparatus and control method thereofYASHIMA JUN·Filed 2011·Granted Jun 18, 2013·2 cites·4 claims
- 0869US8878149B2Charged particle beam writing apparatus and charged particle beam writing methodYASHIMA JUN·Filed 2011·Granted Nov 4, 2014·2 cites·10 claims
- 0967US8527913B2Method for resizing pattern to be written by lithography technique, and charged particle beam writing methodYASHIMA JUN·Filed 2012·Granted Sep 3, 2013·1 cites·10 claims
- 1043US9006691B2Charged particle beam writing apparatus and charged particle beam writing method using a generated frame that surrounds a first data processing blockYASHIMA JUN·Filed 2012·Granted Apr 14, 2015·0 cites·19 claims
- 1142US9188853B2Charged particle beam drawing apparatus and control method thereofYASHIMA JUN·Filed 2011·Granted Nov 17, 2015·0 cites·10 claims
- 1242US8796650B2Charged particle beam drawing method and apparatusYASHIMA JUN·Filed 2010·Granted Aug 5, 2014·0 cites·10 claims
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