Assignee
YASUDA MASAHIKO
JP·5 granted patents·568 citations·filing 2005–2012
Top patents by PatentIndex Score
5 records- 0197US8072578B2Position measurement method, position control method, measurement method, loading method, exposure method and exposure apparatus, and device manufacturing methodYASUDA MASAHIKO·Filed 2008·Granted Dec 6, 2011·551 cites·5 claims
- 0291US8059260B2Position measurement method, position control method, measurement method, loading method, exposure method and exposure apparatus, and device manufacturing methodYASUDA MASAHIKO·Filed 2005·Granted Nov 15, 2011·8 cites·12 claims
- 0390US8576379B2Position measurement method, position control method, measurement method, loading method, exposure method and exposure apparatus, and device manufacturing methodYASUDA MASAHIKO·Filed 2010·Granted Nov 5, 2013·4 cites·7 claims
- 0480US8130361B2Exposure apparatus, exposure method, and method for producing deviceYASUDA MASAHIKO·Filed 2006·Granted Mar 6, 2012·4 cites·72 claims
- 0573US9063438B2Exposure apparatus, exposure method, and method for producing deviceYASUDA MASAHIKO·Filed 2012·Granted Jun 23, 2015·1 cites·41 claims
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