Assignee
YATSUDA KOICHI
JP·3 granted patents·1 pending application·111 citations·filing 2008–2012
Top patents by PatentIndex Score
4 records- 0196US8641916B2Plasma etching apparatus, plasma etching method and storage mediumYATSUDA KOICHI·Filed 2010·Granted Feb 4, 2014·67 cites·19 claims
- 0294US8685267B2Substrate processing methodYATSUDA KOICHI·Filed 2011·Granted Apr 1, 2014·43 cites·15 claims
- 0361US8198183B2Forming method of etching mask, control program and program storage mediumYATSUDA KOICHI·Filed 2008·Granted Jun 12, 2012·1 cites·1 claims
- 0448US2012190206A1Semiconductor device manufacturing methodYATSUDA KOICHI·Filed 2012·Application pending·0 cites
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