Assignee
YI CHANG BOK
US·3 granted patents·7 citations·filing 2004–2010
Top patents by PatentIndex Score
3 records- 0161US9228254B2Cathode sputtering gas distribution apparatusYI CHANG BOK·Filed 2006·Granted Jan 5, 2016·1 cites·12 claims
- 0250US8701753B2Method and apparatus for cooling a planar workpiece in an evacuated environment with dynamically moveable heat sinksYI CHANG BOK·Filed 2004·Granted Apr 22, 2014·6 cites·20 claims
- 0336US8573579B2Biasing a pre-metalized non-conductive substrateYI CHANG BOK·Filed 2010·Granted Nov 5, 2013·0 cites·20 claims
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