Assignee
YIELD ENGINEERING SYSTEMS INC
US·5 granted patents·67 citations·filing 1985–2008
Top patents by PatentIndex Score
5 records- 0190US8361548B2Method for efficient coating of substrates including plasma cleaning and dehydrationYIELD ENGINEERING SYSTEMS INC·Filed 2008·Granted Jan 29, 2013·9 cites·9 claims
- 0266US7727588B2Apparatus for the efficient coating of substratesYIELD ENGINEERING SYSTEMS INC·Filed 2003·Granted Jun 1, 2010·3 cites·17 claims
- 0357US4597736AMethod and apparatus for heating semiconductor wafersYIELD ENGINEERING SYSTEMS INC·Filed 1985·Granted Jul 1, 1986·24 cites·9 claims
- 0449US6198075B1Rapid heating and cooling vacuum ovenYIELD ENGINEERING SYSTEMS INC·Filed 1999·Granted Mar 6, 2001·15 cites·12 claims
- 0543US6267075B1Apparatus for cleaning items using gas plasmaYIELD ENGINEERING SYSTEMS INC·Filed 1999·Granted Jul 31, 2001·16 cites·11 claims
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