Assignee
YIN YAOBO
US·2 granted patents·16 citations·filing 2006–2012
Top patents by PatentIndex Score
2 records- 0186US8327861B2Megasonic precision cleaning of semiconductor process equipment components and partsYIN YAOBO·Filed 2006·Granted Dec 11, 2012·15 cites·15 claims
- 0261US8607806B2Megasonic precision cleaning of semiconductor process equipment components and partsYIN YAOBO·Filed 2012·Granted Dec 17, 2013·1 cites·10 claims
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