Assignee
YOSHIHARA KOUSUKE
JP·12 granted patents·41 citations·filing 2008–2012
Top patents by PatentIndex Score
12 records- 0190US9162247B2Coating and development treatment system with airflow control including control unit and movable airflow control plateYOSHIHARA KOUSUKE·Filed 2012·Granted Oct 20, 2015·11 cites·7 claims
- 0287US8287954B2Apparatus and method of forming an applied filmYOSHIHARA KOUSUKE·Filed 2010·Granted Oct 16, 2012·7 cites·6 claims
- 0379US8414972B2Coating treatment method, coating treatment apparatus, and computer-readable storage mediumYOSHIHARA KOUSUKE·Filed 2008·Granted Apr 9, 2013·5 cites·8 claims
- 0479US8225738B2Resist coating method and resist coating apparatusYOSHIHARA KOUSUKE·Filed 2011·Granted Jul 24, 2012·4 cites·13 claims
- 0577US8496991B2Coating treatment methodYOSHIHARA KOUSUKE·Filed 2011·Granted Jul 30, 2013·3 cites·2 claims
- 0672US8980013B2Substrate cleaning method and substrate cleaning apparatusYOSHIHARA KOUSUKE·Filed 2012·Granted Mar 17, 2015·2 cites·7 claims
- 0772US8216389B2Substrate cleaning method and substrate cleaning apparatusYOSHIHARA KOUSUKE·Filed 2009·Granted Jul 10, 2012·3 cites·5 claims
- 0870US8505479B2Resist coating apparatusYOSHIHARA KOUSUKE·Filed 2010·Granted Aug 13, 2013·2 cites·22 claims
- 0968US8940649B2Coating treatment method, non-transitory computer storage medium and coating treatment apparatusYOSHIHARA KOUSUKE·Filed 2011·Granted Jan 27, 2015·2 cites·14 claims
- 1067US8318247B2Coating treatment method, coating treatment apparatus, and computer-readable storage mediumYOSHIHARA KOUSUKE·Filed 2008·Granted Nov 27, 2012·2 cites·2 claims
- 1141US8105738B2Developing methodYOSHIHARA KOUSUKE·Filed 2011·Granted Jan 31, 2012·0 cites·20 claims
- 1240US8691336B2Coating treatment method, non-transitory computer storage medium and coating treatment apparatusYOSHIHARA KOUSUKE·Filed 2011·Granted Apr 8, 2014·0 cites·4 claims
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