Assignee
YOSHIOKA KEN
JP·3 granted patents·4 pending applications·13 citations·filing 2006–2012
Top patents by PatentIndex Score
7 records- 0188US8252132B2Method and apparatus for repairing an electrostatic chuck device, and the electrostatic chuck deviceYOSHIOKA KEN·Filed 2010·Granted Aug 28, 2012·9 cites·9 claims
- 0272US9039865B2Plasma processing apparatusYOSHIOKA KEN·Filed 2010·Granted May 26, 2015·3 cites·7 claims
- 0364US9017786B2Method and apparatus for repairing an electrostatic chuck device, and the electrostatic chuck deviceYOSHIOKA KEN·Filed 2012·Granted Apr 28, 2015·1 cites·11 claims
- 0449US2008170969A1Plasma processing apparatusYOSHIOKA KEN·Filed 2007·Application pending·0 cites
- 0547US2009317624A1Uniformly dispersed photocatalyst coating liquid, method for producing same, and photocatalytically active composite material obtained by using sameYOSHIOKA KEN·Filed 2007·Application pending·0 cites
- 0646US2012000774A1Plasma Processing ApparatusYOSHIOKA KEN·Filed 2011·Application pending·0 cites
- 0742US2007209933A1Sample holding electrode and a plasma processing apparatus using the sameYOSHIOKA KEN·Filed 2006·Application pending·0 cites
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