Assignee
YOSHITAKE SHUSUKE
JP·3 granted patents·5 citations·filing 2009–2011
Top patents by PatentIndex Score
3 records- 0179US8399833B2Charged particle beam writing method, method for detecting position of reference mark for charged particle beam writing, and charged particle beam writing apparatusYOSHITAKE SHUSUKE·Filed 2010·Granted Mar 19, 2013·5 cites·6 claims
- 0250US8718972B2Electron beam writing apparatus and position displacement amount correcting methodYOSHITAKE SHUSUKE·Filed 2009·Granted May 6, 2014·0 cites·7 claims
- 0339US9552963B2Charged particle beam writing apparatus and method thereforYOSHITAKE SHUSUKE·Filed 2011·Granted Jan 24, 2017·0 cites·8 claims
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