Assignee
YOUNG DONNY
US·5 granted patents·17 citations·filing 2006–2012
Top patents by PatentIndex Score
5 records- 0185US8790499B2Process kit components for titanium sputtering chamberYOUNG DONNY·Filed 2006·Granted Jul 29, 2014·9 cites·16 claims
- 0281US8668815B2Process kit for RF physical vapor depositionYOUNG DONNY·Filed 2012·Granted Mar 11, 2014·4 cites·10 claims
- 0375US9123511B2Process kit for RF physical vapor depositionYOUNG DONNY·Filed 2009·Granted Sep 1, 2015·3 cites·11 claims
- 0463US9303311B2Substrate processing system with mechanically floating target assemblyYOUNG DONNY·Filed 2012·Granted Apr 5, 2016·1 cites·20 claims
- 0552US9255322B2Substrate processing system having symmetric RF distribution and return pathsYOUNG DONNY·Filed 2012·Granted Feb 9, 2016·0 cites·20 claims
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