Assignee
YU SHINN-SHENG
TW·3 granted patents·329 citations·filing 2011–2012
Top patents by PatentIndex Score
3 records- 0198US8841047B2Extreme ultraviolet lithography process and maskYU SHINN-SHENG·Filed 2012·Granted Sep 23, 2014·326 cites·20 claims
- 0275US8492054B2Mechanisms for patterning fine featuresYU SHINN-SHENG·Filed 2011·Granted Jul 23, 2013·2 cites·20 claims
- 0368US8663878B2Mask and method for forming the sameYU SHINN-SHENG·Filed 2012·Granted Mar 4, 2014·1 cites·20 claims
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