Assignee
Z CAP L L C
US·3 granted patents·66 citations·filing 1999–2001
Top patents by PatentIndex Score
3 records- 0187US6284055B1Method and apparatus for immersion treatment of semiconductor and other devicesZ CAP L L C·Filed 2000·Granted Sep 4, 2001·33 cites·20 claims
- 0266US6641675B2Method and apparatus for immersion treatment of semiconductor and other devicesZ CAP L L C·Filed 2001·Granted Nov 4, 2003·8 cites·47 claims
- 0359US6415803B1Method and apparatus for semiconductor wafer cleaning with reuse of chemicalsZ CAP L L C·Filed 1999·Granted Jul 9, 2002·25 cites·11 claims
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