Assignee
ZEISS CARL NTS GMBH
DE·40 granted patents·519 citations·filing 2001–2010
Top patents by PatentIndex Score
40 records- 0196US7375325B2Method for preparing a sample for electron microscopic examinations, and sample supports and transport holders used thereforZEISS CARL NTS GMBH·Filed 2006·Granted May 20, 2008·37 cites·35 claims
- 0295US7321124B2Corrector for correcting first-order chromatic aberrations of the first degreeZEISS CARL NTS GMBH·Filed 2006·Granted Jan 22, 2008·20 cites·15 claims
- 0395US6855938B2Objective lens for an electron microscopy system and electron microscopy systemZEISS CARL NTS GMBH·Filed 2003·Granted Feb 15, 2005·97 cites·51 claims
- 0490US7741602B2Phase contrast electron microscopeZEISS CARL NTS GMBH·Filed 2007·Granted Jun 22, 2010·15 cites·18 claims
- 0589US7435973B2Material processing system and methodZEISS CARL NTS GMBH·Filed 2006·Granted Oct 14, 2008·15 cites·20 claims
- 0689US7312448B2Method and apparatus for quantitative three-dimensional reconstruction in scanning electron microscopyZEISS CARL NTS GMBH·Filed 2005·Granted Dec 25, 2007·45 cites·13 claims
- 0787US7902506B2Phase-shifting element and particle beam device having a phase-shifting elementZEISS CARL NTS GMBH·Filed 2008·Granted Mar 8, 2011·10 cites·17 claims
- 0886US7750293B2High-density FIB-SEM tomography via real-time imagingZEISS CARL NTS GMBH·Filed 2007·Granted Jul 6, 2010·17 cites·9 claims
- 0986US7645989B2Electron microscope for inspecting and processing of an object with miniaturized structures and method thereofZEISS CARL NTS GMBH·Filed 2007·Granted Jan 12, 2010·13 cites·19 claims
- 1086US7425701B2Electron-beam device and detector systemZEISS CARL NTS GMBH·Filed 2004·Granted Sep 16, 2008·20 cites·20 claims
- 1182US6878936B2Applications operating with beams of charged particlesZEISS CARL NTS GMBH·Filed 2003·Granted Apr 12, 2005·17 cites·40 claims
- 1281US7910887B2Electron-beam device and detector systemZEISS CARL NTS GMBH·Filed 2009·Granted Mar 22, 2011·4 cites·23 claims
- 1381US7462839B2Detector for variable pressure areas and an electron microscope comprising a corresponding detectorZEISS CARL NTS GMBH·Filed 2001·Granted Dec 9, 2008·26 cites·24 claims
- 1481US7084406B2Detector arrangement and detection methodZEISS CARL NTS GMBH·Filed 2002·Granted Aug 1, 2006·16 cites·50 claims
- 1581US6891168B2Particle-optical apparatus and method for operating the sameZEISS CARL NTS GMBH·Filed 2003·Granted May 10, 2005·16 cites·30 claims
- 1680US7507962B2Electron-beam device and detector systemZEISS CARL NTS GMBH·Filed 2006·Granted Mar 24, 2009·4 cites·13 claims
- 1777US6946657B2Electron microscopy systemZEISS CARL NTS GMBH·Filed 2003·Granted Sep 20, 2005·13 cites·20 claims
- 1876US6861651B2Electron-optical corrector for eliminating third-order aberationsZEISS CARL NTS GMBH·Filed 2001·Granted Mar 1, 2005·12 cites·26 claims
- 1975US6967328B2Method for the electron-microscopic observation of a semiconductor arrangement and apparatus thereforZEISS CARL NTS GMBH·Filed 2003·Granted Nov 22, 2005·18 cites·21 claims
- 2074US7868290B2Material processing system and methodZEISS CARL NTS GMBH·Filed 2008·Granted Jan 11, 2011·3 cites·10 claims
- 2173US7888643B2Focusing and positioning device for a particle-optical raster microscopeZEISS CARL NTS GMBH·Filed 2008·Granted Feb 15, 2011·3 cites·17 claims
- 2273US7135677B2Beam guiding arrangement, imaging method, electron microscopy system and electron lithography systemZEISS CARL NTS GMBH·Filed 2003·Granted Nov 14, 2006·11 cites·44 claims
- 2372US6914249B2Particle-optical apparatus, electron microscopy system and electron lithography systemZEISS CARL NTS GMBH·Filed 2003·Granted Jul 5, 2005·9 cites·21 claims
- 2470US7521677B2Method and device for distance measurementZEISS CARL NTS GMBH·Filed 2006·Granted Apr 21, 2009·4 cites·28 claims
- 2570US7105814B2Electron microscopy system and electron microscopy methodZEISS CARL NTS GMBH·Filed 2003·Granted Sep 12, 2006·8 cites·18 claims
- 2670US7022987B2Particle-optical arrangements and particle-optical systemsZEISS CARL NTS GMBH·Filed 2003·Granted Apr 4, 2006·8 cites·43 claims
- 2769US7285780B2Detector system for a scanning electron microscope and a scanning electron microscope incorporating said detector systemZEISS CARL NTS GMBH·Filed 2006·Granted Oct 23, 2007·4 cites·31 claims
- 2869US6872956B2Particle beam device with a particle source to be operated in high vacuum and cascade-type pump arrangement for such a particle beam deviceZEISS CARL NTS GMBH·Filed 2003·Granted Mar 29, 2005·17 cites·8 claims
- 2968US6828565B2Electron beam source, electron optical apparatus using such beam source and method of operating and electron beam sourceZEISS CARL NTS GMBH·Filed 2003·Granted Dec 7, 2004·7 cites·21 claims
- 3063US6949744B2Electron microscopy system, electron microscopy method and focusing system for charged particlesZEISS CARL NTS GMBH·Filed 2004·Granted Sep 27, 2005·5 cites·42 claims
- 3162US7523009B2Control of instrumentsZEISS CARL NTS GMBH·Filed 2003·Granted Apr 21, 2009·8 cites·34 claims
- 3260US7923702B2System and method for processing an objectZEISS CARL NTS GMBH·Filed 2008·Granted Apr 12, 2011·1 cites·19 claims
- 3359US7109487B2Particle beam deviceZEISS CARL NTS GMBH·Filed 2004·Granted Sep 19, 2006·6 cites·18 claims
- 3458US7060978B2Detector system for a particle beam apparatus, and particle beam apparatus with such a detector systemZEISS CARL NTS GMBH·Filed 2001·Granted Jun 13, 2006·4 cites·20 claims
- 3557US6969854B1Arrangement for holding a particle beam apparatusZEISS CARL NTS GMBH·Filed 2003·Granted Nov 29, 2005·3 cites·47 claims
- 3652US6914248B2Particle-optical apparatus and method for operating the sameZEISS CARL NTS GMBH·Filed 2003·Granted Jul 5, 2005·2 cites·22 claims
- 3751US8039796B2Phase contrast electron microscopeZEISS CARL NTS GMBH·Filed 2010·Granted Oct 18, 2011·0 cites·4 claims
- 3850US7211806B2Particle beam apparatusZEISS CARL NTS GMBH·Filed 2004·Granted May 1, 2007·1 cites·12 claims
- 3946US8008639B2System for processing an objectZEISS CARL NTS GMBH·Filed 2008·Granted Aug 30, 2011·0 cites·28 claims
- 4039US7119344B2Electron beam device having a specimen holderZEISS CARL NTS GMBH·Filed 2004·Granted Oct 10, 2006·0 cites·24 claims
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