Assignee
ZEISS CARL SMS GMBH
DE·23 granted patents·4 pending applications·125 citations·filing 2004–2015
Top patents by PatentIndex Score
27 records- 0191US7368738B2Advanced pattern definition for particle-beam exposureZEISS CARL SMS GMBH·Filed 2005·Granted May 6, 2008·40 cites·33 claims
- 0289US8026495B2Charged particle beam exposure systemZEISS CARL SMS GMBH·Filed 2005·Granted Sep 27, 2011·11 cites·17 claims
- 0386US8368030B2Charged particle beam exposure system and beam manipulating arrangementZEISS CARL SMS GMBH·Filed 2006·Granted Feb 5, 2013·9 cites·18 claims
- 0479US8769709B2Apparatus and method for analyzing and modifying a specimen surfaceZEISS CARL SMS GMBH·Filed 2013·Granted Jul 1, 2014·4 cites·20 claims
- 0579US8368015B2Particle-optical systemZEISS CARL SMS GMBH·Filed 2006·Granted Feb 5, 2013·10 cites·24 claims
- 0677US7916930B2Method and arrangement for repairing photolithography masksZEISS CARL SMS GMBH·Filed 2007·Granted Mar 29, 2011·5 cites·13 claims
- 0772US9261775B2Method for analyzing a photomaskZEISS CARL SMS GMBH·Filed 2014·Granted Feb 16, 2016·3 cites·21 claims
- 0872US9115981B2Apparatus and method for investigating an objectZEISS CARL SMS GMBH·Filed 2013·Granted Aug 25, 2015·3 cites·25 claims
- 0967US9354048B2Method for measuring a lithography mask or a mask blankZEISS CARL SMS GMBH·Filed 2015·Granted May 31, 2016·1 cites·21 claims
- 1064US9366637B2Method for establishing distortion properties of an optical system in a microlithographic measurement systemZEISS CARL SMS GMBH·Filed 2014·Granted Jun 14, 2016·2 cites·14 claims
- 1163US9528825B2Method for calibrating a position-measuring system and position-measuring systemZEISS CARL SMS GMBH·Filed 2014·Granted Dec 27, 2016·2 cites·19 claims
- 1262US7911624B2Device and method for the interferometric measurement of phase masksZEISS CARL SMS GMBH·Filed 2006·Granted Mar 22, 2011·3 cites·35 claims
- 1361US8049189B2Charged particle systemZEISS CARL SMS GMBH·Filed 2006·Granted Nov 1, 2011·1 cites·19 claims
- 1461US7535640B2Imaging system for emulation of a high aperture scanning systemZEISS CARL SMS GMBH·Filed 2004·Granted May 19, 2009·7 cites·8 claims
- 1560US7961297B2Method for determining intensity distribution in the image plane of a projection exposure arrangementZEISS CARL SMS GMBH·Filed 2006·Granted Jun 14, 2011·1 cites·25 claims
- 1658US7286284B2Microscope imaging system and method for emulating a high aperture imaging system, particularly for mask inspectionZEISS CARL SMS GMBH·Filed 2004·Granted Oct 23, 2007·13 cites·34 claims
- 1757US7626689B2Method and device for analysing the imaging behavior of an optical imaging elementZEISS CARL SMS GMBH·Filed 2006·Granted Dec 1, 2009·1 cites·30 claims
- 1854US7525115B2Arrangement for inspecting objects, especially masks in microlithographyZEISS CARL SMS GMBH·Filed 2004·Granted Apr 28, 2009·3 cites·6 claims
- 1951US8369605B2Method and apparatus for determining the position of a structure on a carrier relative to a reference point of the carrierZEISS CARL SMS GMBH·Filed 2007·Granted Feb 5, 2013·1 cites·22 claims
- 2050US7443589B2Optical component for beam shapingZEISS CARL SMS GMBH·Filed 2006·Granted Oct 28, 2008·2 cites·12 claims
- 2148US9268124B2Microscope and method for characterizing structures on an objectZEISS CARL SMS GMBH·Filed 2013·Granted Feb 23, 2016·0 cites·18 claims
- 2247US7831105B2Method for determining the image quality of an optical imaging systemZEISS CARL SMS GMBH·Filed 2004·Granted Nov 9, 2010·3 cites·24 claims
- 2347US2015198541A1Method and device for examining a maskZEISS CARL SMS GMBH·Filed 2015·Application pending·0 cites
- 2446US9255876B2Temperature sensor and method for measuring a temperature changeZEISS CARL SMS GMBH·Filed 2013·Granted Feb 9, 2016·0 cites·20 claims
- 2540US2014255831A1Method and apparatus for protecting a substrate during processing by a particle beamZEISS CARL SMS GMBH·Filed 2014·Application pending·0 cites
- 2638US2010297362A1Method for processing an object with miniaturized structuresZEISS CARL SMS GMBH·Filed 2010·Application pending·0 cites
- 2733US2005116144A1Light detector with enhanced quantum efficiencyZEISS CARL SMS GMBH·Filed 2004·Application pending·0 cites
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