Assignee
ZEISS CARL SMS LTD
IL·7 granted patents·6 pending applications·3 citations·filing 2014–2025
Top patents by PatentIndex Score
13 records- 0179US10353295B2Method and apparatus for generating a predetermined three-dimensional contour of an optical component and/or a waferZEISS CARL SMS LTD·Filed 2016·Granted Jul 16, 2019·3 cites·58 claims
- 0266US2024402591A1Ml reflectivity modificationZEISS CARL SMS LTD·Filed 2024·Application pending·0 cites
- 0364US2025237960A1Methods, computer programs and apparatuses for treating an optical element for the extreme ultraviolet wavelength rangeZEISS CARL SMS LTD·Filed 2025·Application pending·0 cites
- 0462US2023408911A1Method and apparatus for optimizing a defect correction for an optical element used in a lithographic processZEISS CARL SMS LTD·Filed 2023·Application pending·0 cites
- 0561US2025385095A1Wafer conditioningZEISS CARL SMS LTD·Filed 2025·Application pending·0 cites
- 0661US2024280892A1Method for correcting errors in photolithographic masks while avoiding damage to rear-side coatingsZEISS CARL SMS LTD·Filed 2024·Application pending·0 cites
- 0753US9798249B2Method and apparatus for compensating at least one defect of an optical systemZEISS CARL SMS LTD·Filed 2014·Granted Oct 24, 2017·0 cites·20 claims
- 0852US10114294B2Apparatus and method for imparting direction-selective light attenuationZEISS CARL SMS LTD·Filed 2017·Granted Oct 30, 2018·0 cites·36 claims
- 0951US11385539B2Method and apparatus for compensating defects of a mask blankZEISS CARL SMS LTD·Filed 2020·Granted Jul 12, 2022·0 cites·20 claims
- 1050US11914289B2Method and apparatus for determining an effect of one or more pixels to be introduced into a substrate of a photolithographic maskZEISS CARL SMS LTD·Filed 2021·Granted Feb 27, 2024·0 cites·19 claims
- 1148US9690191B2Surface defect repair by irradiationZEISS CARL SMS LTD·Filed 2014·Granted Jun 27, 2017·0 cites·22 claims
- 1245US11366383B2Method and apparatus for determining positions of a plurality of pixels to be introduced in a substrate of a photolithographic maskZEISS CARL SMS LTD·Filed 2019·Granted Jun 21, 2022·0 cites·22 claims
- 1345US2025379057A1Wafer and die shape controlZEISS CARL SMS LTD·Filed 2025·Application pending·0 cites
Join the waitlist — get patent alerts
Get an alert when ZEISS CARL SMS LTD files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Counts cover granted patents and pending applications in the PatentIndex corpus. How scoring works →